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Is there anyone who knows a recipe to wet etch Ta2O5 ?

S. REYNAUD

#2965

Is there anyone who knows a recipe to wet etch Ta2O5 ? | 22 September, 2000

Hi guys !!

I'm searching a method to wet etch 100 Angstr�m of an optic layer of Ta2O5, through a photo resist mask.

Thanks in advance

St�phanie

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