SMT Equipment

HEPA Vacuum Pump

Company Information:

a leading manufacturer of wafer handling tools for the global semiconductor industry. Our products include vacuum wands, wafer tweezers, HEPA vacuum pumps, etc. ESD safe products and tools for 300mm wafers are also available.

Edogawa-ku, Japan


  • Phone 81-3-3618-0368
  • Fax 81-3-3618-0380

See Supplier Website »

Company Postings:

(3) products in the catalog

HEPA Vacuum Pump

HEPA Vacuum Pump


HEPA Vacuum Pump



Offered by:

Fluoro Mechanic Co., Ltd.


HEPA Vacuum Pump Description:

Oil Free Diaphragm Vacuum Pump with Built in HEPA filters

  • Built in inlet and outlet HEPA filters*
  • The filter windows**
  • Oil-free for cleanroom use
  • Long term high reliability
  • Designed to minimize noise generation
  • Nylon body for static protection
  • Compact design
  • ESD Safe Tubing (Accessory)
  • Static-Dissipative Grounding Kit (Accessory)
  • HEPA Filter Kit (Replacement Part)
  • Compliance with CE regulations

HEPA filters trap 99.97% of all particles down to 0.3 microns.

HEPA Vacuum Pump was added in Jan 2001

HEPA Vacuum Pump has been viewed 576 times

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Reflow Oven