Precision Alignment Systems

Company Information:

ABM designs and manufactures mask aligners, exposure systems, photolithographic products and accessories used in the production of semiconductor integrated circuits.

San Jose, California, USA

Manufacturer, Other

408-972-5085
408-972*0939

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Company Postings:

(3) products in the catalog

Name:	Precision Alignment Systems
Offered by:	ABM, Inc.

Precision Alignment Systems Description:

Substrate To Mask, Mask to Mask, Substrate To Substrate
Interchangeable Vacuum Mask Holders Up to 17"
Interchangeable Vacuum Chucks For Substrates Up To 16" Square, .3" Thick. Fixed Level And Planarizing Configurations, Fixed Or Removable Substrate Pre-Alignment
Chuck Motions: Micrometer Driven X, Y, & Theta, Precision Z Adjust (for fine gap settings), Differential Micrometer Option With (coarse/fine motion)
Pneumatic Controls: On/Off, Substrate, Mask, Adjustable Contact, & Ball Lock Vacuum (for planarizing chucks), Adjustable N2 Purge, Mask Frame (up/down)

Precision Alignment Systems was added in Sep 2007

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