Werlchem LLC

Porous ceramic vacuum chuck table or Polishing Chuck table supplied to semiconductor industry for silicon wafer dicing or finishing purposes. This product is an uniform compact frame, high strength, g

Manufacturer


Company

With our unique know how of ceramic industry and years immersing in Semi Conductor Industry, Werlchem LLC is at the forefront in the development of materials and components for the demanding environments of semiconductor processing such as chuck table,end effectors etc.
Typical materials used by us:
Alumina
Aluminium Nitride
Ceramic/Metal Assemblies
CVD Silicon Carbide
Silicon Carbide (SiC)
Soft Coatings
Zirconia (TZP)
Sapphire
Silicon Carbide
Boron Nitride
Gallium
Indium

Typical Applications:
Porous chuck table
E-chucks
Heater Assemblies
Lift Pins
Wafer Clamps
End Effectors
Chamber Rings
Heaters
Power Supplies
CMP Pad Conditioners
RTP Edge Rings
Crystal Growth Crucibles

Werlchem LLC Postings

1 product »

Porous Ceramic Chuck Table

Porous ceramic vacuum chuck table or Polishing Chuck table supplied to semiconductor industry for silicon wafer dicing or finishing purposes. This product is an uniform compact frame, high strength, good porosity, durable absorption, ex...

Components

Porous Ceramic Chuck Table
FPC* - Fluid Pressure Control - Dispensing Pump

Dual Lane Reflow Oven