Next-Generation Test Equipment For High-Volume Wafer Production

Published:

June 23, 2010

Author:

Kay Gastinger, Odd Løvhaugen

Abstract:

Quality control is one of the main bottlenecks in the production of micro-opto-electromechanical systems/microelectromechanical systems (MOEMS/MEMS) because each structure on a wafer is serially inspected and scanned stepwise over the entire wafer area. ...

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Company Information:

SPIE - International Society for Optical Engineering

An international society advancing an interdisciplinary approach to the science and application of light.

Bellingham, Washington, USA

Association / Non-Profit

  • Phone (360) 676-3290
  • Fax (360) 647-1445

SPIE - International Society for Optical Engineering website

Company Postings:

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