The Evolution of Intel's Copy EXACTLY! Technology Transfer Method
Published: |
May 6, 1999 |
Author: |
Chris J. McDonald , Intel SEMATECH |
Abstract: |
Semiconductor manufacturing is characterized by very complex process flows made up of individual process steps, many of which are built to very close tolerances. Furthermore, there are complex interactions in these process flows, whereby each process step can affect many other steps, and each final device parameter might be determined by the results from many inputs...... |
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