Guidelines for Manufacturing Equipment Reference Manuals

Published:

August 5, 1999

Author:

Victoria J. Pruett, SEMI/SEMATECH; Julian Serda, Advanced Micro Devices; Darin Shifley, Applied Materials, Inc.

Abstract:

This document provides suggested standard contents for equipment reference manuals for semiconductor process equipment. It includes a generic and detailed outline for equipment manuals, with major sections on installing, operating, controlling, and integrating process equipment....

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Company Information:

An association of member companies cooperating on research in key areas of semiconductor technology, with a strong focus on thin-film photovoltaic (PV) manufacturing.

Albany, New York, USA

Association / Non-Profit

  • Phone (518) 649-1000

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Company Postings:

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