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Cimetrix 300 mm Tool Connectivity Software Continues Market Penetration

May 14, 2002

PRNewswire

Salt Lake City, Utah

Cimetrix Incorporated (OTC: CMXX - News) announced that Thermo Nicolet, the design and production leader of Fourier transform infrared (FT-IR) and Raman metrology tools has purchased and successfully integrated Cimetrix's 300 mm connectivity software into its advanced metrology product line. Thermo Nicolet has utilized Cimetrix's CIMConnect(TM) and CIM300(TM) in its ECO� 3000 FT-IR 300 mm wafer-testing tool. Integration and approval of the communication software was completed in 18 weeks.

"After investigating, we found that the Cimetrix software was well accepted by our customers," stated Joe Hodkiewicz, Semiconductor Product Manager, Thermo Nicolet. "Cimetrix's technical knowledge and responsiveness gave us confidence that the project could be completed quickly."

Inspection and metrology tools play a significant role as the industry moves to 300 mm wafer production. Semiconductor manufacturing utilizes advanced materials with small features, and the ability to measure and monitor the process is vital. As chip densities increase, the volume of inspection and measurement data also increases. CIM300 provides the necessary communication software conduit for yield data management and analysis. The ECO 3000 is used by semiconductor manufacturers to enhance overall fab yields. This high performance, FT-IR metrology tool accurately measures dopant concentration levels in traditional dielectric films, critical characteristics of new low-k dielectric films, hydrogen levels in silicon nitride films, epitaxial film thickness, micro electro mechanical systems device thickness, substitutional carbon, and interstitial oxygen levels in silicon wafers.

CIM300 supports the SEMI standards E39, E40, E87, E90 and E94 and can be used with existing GEM interfaces. Its modular architecture allows the equipment supplier the flexibility to implement one or more of the connectivity standards. CIM300 utilizes dynamically linked libraries instead of standard C-type libraries that provide for reduced integration time and the ability to quickly evolve when standards change or software is upgraded.

CIMConnect provides SECS/GEM tool connectivity protocols. The software is designed to anticipate web applications and has an infrastructure to allow publishing information to the Internet, an intranet, or an extranet, which will facilitate e-diagnostics. This technology will enable equipment producers to gain crucial data on tool performance and increase responsiveness to potential difficulties decreasing overall downtime.

About Thermo Nicolet

Thermo Nicolet, a Thermo Electron business (NYSE: TMO - News), is the world's leading manufacturer of Fourier transform infrared (FT-IR) and Raman spectrometers, microscopes, sampling accessories, software, and spectral libraries. Thermo Nicolet instruments are used throughout the semiconductor, chemical, pharmaceutical, polymer, petrochemical, food, and energy industries, as well as in government and university laboratories. For more information on Thermo Nicolet, please visit http://www.thermo.com/thermonicolet .

About Cimetrix Incorporated

Cimetrix Incorporated, headquartered in Salt Lake City, Utah, is a developer of connectivity software for 300 mm semiconductor tools and motion intensive applications such as, surface mount technology equipment, electronics assembly equipment, robots, and machine tools. Their core products are Cimetrix Open Development Environment (CODE), CIM300, CIMConnect, and CIMControl. For more information, please visit http://www.cimetrix.com .

Forward-looking Statement Disclaimer: The matters discussed in this news release include forward-looking statements made by the company's president of semiconductor division that involve risks and uncertainties including but not limited to economic conditions, industry conditions, trade environment, competitive and technical advantages of CIM300 and CIMConnect and other risks discussed more fully in filings by the company with the Securities and Exchange Commission. Reference is made to the company's most recent Forms 10K and 10Q, which detail such risk factors.

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