Full Site - : vitronics controller gives error on communication (Page 5 of 6)

Re: GEM SECS interface

Electronics Forum | Fri Oct 23 18:13:53 EDT 1998 | Dave f

| I am looking for detailed information on the SECS 2 protocol that is part of the SEMI General Equipment Module interface. I was not able to get detailed information from the SEMI web site and was not able to find anything on the web. | | I am look


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