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. However, the capital cost, productivity, and thickness of the package sidewall coating from sputtering equipment have been stumbling blocks for widespread adoption of this technology to a wider array
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. The active species within the plasma are cable of both physical work via ion assisted sputtering and chemical work through radical or byproduct chemical reaction
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. The active species within the plasma are cable of physical work via ion assisted sputtering and chemical work through radical or byproduct chemical reaction
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