231 accelerometers mems ultra low-power 3-axes results

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SMTnet Express - December 20, 2018

and MEMs lid-attach technology, it is becoming increas

Wafer-Level Packaged MEMS Switch With TSV

Wafer-Level Packaged MEMS Switch With TSV Wafer-Level Packaged MEMS Switch With TSV by: Nicolas Lietaer, Thor Bakke, Anand Summanwar; SINTEF , Per Dalsjø, Jakob Gakkestad; Norwegian Defence Research Establishment (FFI), Frank Niklaus; KTH - Royal

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