Wafer-Level Packaged MEMS Switch With TSV Wafer-Level Packaged MEMS Switch With TSV by: Nicolas Lietaer, Thor Bakke, Anand Summanwar; SINTEF , Per Dalsjø, Jakob Gakkestad; Norwegian Defence Research Establishment (FFI), Frank Niklaus; KTH - Royal
SMTnet Express, March 2, 2017, Subscribers: 30,206, Companies: 15,145, Users: 41,992 Nanoelectromechanical Switches for Low-Power Digital Computing Alexis Peschot, Chuang Qian, Tsu-Jae King Liu; EECS at University of California The need for more