GPD Global | https://www.gpd-global.com/co_website/pdf/doc/FLOwareGEMInterface_1.2.0.pdf
Communications Standard 2 Message Content SECS-II SEMI E4 SEMI Equipment Communications Standard 1 Message Transfer SECS-I SEMI E37 High Speed Message Service-Single Session HSMS-SS For more information about SEMI or the standards produced by SEMI, contact SEMI by
