AW-1008 Plasma Asher Equipment
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AW-1008 Plasma Asher Equipment |
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AW-1008 Plasma Asher Equipment Description:
sales@allwin21.com
The AW-1008 single-wafer photoresist asher is an automated tool designed as a flexible downstream Microwave plasma photoresist removal system for high-volume wafer fabrication. The AW-1008 is in direct response to manufacturer’s concerns for wafer sensitivity to processing RF damage, uptime, reliability and production-proven technology.
Key Features:
- Production-proven plasma stripper/Asher system technology.
- 5-15% Uniformity. (Process & Hardware dependent. Optional.)
- Fast strip/ash rate. (Process & Hardware dependent. Optional.)
- Increased throughput with 3-Axis Integrated Robust Solid Robot.
- Frontside and backside isotropic removal.
- 3x 1kW IR Lamp for uniform heating up to 500C.
- 75mm-150mm wafer capability.
- Endpoint detection w/Allwin21 SLOPE technology (Optional)
- 2 wafer sizes capability without hardware change if necessary.
- Two Fixed cassette stations. Or, one Fixed & one centering station.
- Can handle 50um thickness wafer
- PC controller with Advanced Allwin21 Software Package
- Up to 4 gas lines with MFC’s
- 2.45GHz 1000W Microwave
- Pressure control with Throttle Valve
- Touch screen monitor
- EMO, Interlocks, and Watchdog function
- GEM/SECS II interface, Optional
- Small Footprint : 35”W x 40”D x 55”H (250LBs)
- Made in U.S.A.
Specifications:
- Wafer Size: 3 ,4,5,6 inch Capability. Multiple wafer size without hardware charge.
- Temperature: 150-350 ºC (±2 ºC) capability
- Gas Lines: Up to four gas lines with MFCs. Popular MFC Range: 510 SLM O2 and 1 SLM N2.
- Asher Rate: 1.5u-5u/min. positive photoresist; >8u/min. negative photoresist
- Uniformity: 15%, Process Dependent
- Particulate: <0.05 /cm2 (0.03um or greater)
- Damage: CV: <0.I V CV-shift for 250A gate oxide
- Selectivity: >1000:1
- MTBF/MTTA/MTTR: 450 Hours/100 Hours/3.5 Hours or Better. 95% uptime
- *Contact Allwin21 sales for other applications and specifications
sales@allwin21.com
AW-1008 Plasma Asher Equipment was added in Sep 2007
AW-1008 Plasma Asher Equipment has been viewed 144 times
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