AW-1008 Plasma Asher Equipment

AW-1008 Plasma Asher Equipment Description:

sales@allwin21.com

The AW-1008 single-wafer photoresist asher is an automated tool designed as a flexible downstream Microwave plasma photoresist removal system for high-volume wafer fabrication.  The AW-1008 is in direct response to manufacturer’s concerns for wafer sensitivity to processing RF damage, uptime, reliability and production-proven technology.

Key Features:

1.           Production-proven plasma stripper/Asher system technology.
2.           5-15% Uniformity. (Process & Hardware dependent.  Optional.)
3.           Fast strip/ash rate. (Process & Hardware dependent.  Optional.)
4.           Increased throughput with 3-Axis Integrated Robust Solid Robot.
5.           Frontside and backside isotropic removal.
6.           3x 1kW IR Lamp for uniform heating up to 500C.
7.           75mm-150mm wafer capability.
8.           Endpoint detection w/Allwin21 SLOPE technology (Optional)
9.           2 wafer sizes capability without hardware change if necessary.
10.           Two Fixed cassette stations.  Or, one Fixed & one centering station.
11.           Can handle 50um thickness wafer
12.           PC controller with Advanced Allwin21 Software Package
13.           Up to 4 gas lines with MFC’s
14.           2.45GHz 1000W Microwave
15.           Pressure control with Throttle Valve
16.           Touch screen monitor
17.           EMO, Interlocks, and Watchdog function
18.           GEM/SECS II interface, Optional
19.           Small Footprint : 35”W x 40”D x 55”H (250LBs)
20.           Made in U.S.A.

Specifications:

1. Wafer Size: 3 ,4,5,6 inch Capability. Multiple wafer size without hardware charge.
2. Temperature: 150-350 ºC (±2 ºC) capability
3. Gas Lines: Up to four gas lines with MFCs. Popular MFC Range: 510 SLM O2 and 1 SLM  N2.
4. Asher Rate: 1.5u-5u/min. positive photoresist; >8u/min. negative photoresist
5. Uniformity: 15%,  Process Dependent
6. Particulate: <0.05 /cm2 (0.03um or greater)
7. Damage: CV: <0.I V CV-shift for 250A gate oxide
8. Selectivity: >1000:1
9. MTBF/MTTA/MTTR: 450 Hours/100 Hours/3.5 Hours or Better. 95% uptime
10. *Contact Allwin21 sales for other applications and specifications

sales@allwin21.com