AW-105R Plasma Asher Descum Equipment
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AW-105R Plasma Asher Descum Equipment |
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AW-105R Plasma Asher Descum Equipment Description:
sales@allwin21.com
The AW-105R single-wafer photoresist asher and descum is an automated tool designed as a flexible 13.56MHz RF Parallel Plate plasma photoresist removal and descum system for high-volume wafer fabrication. The AW-105R is in direct response to manufacturer’s concerns for wafer uniformity, uptime, reliability and production-proven technology.
Key Features:
- Production-proven plasma Asher/Descum system.
- Integrated solid robotic wafer handling, Single wafer process.
- Up to 3%-5% Uniformity. Best for III-V Materials.
- Frontside and backside isotropic removal.
- Consistent wafer-to-wafer process cycle repeatability.
- Element heating for up to 250oC.
- 50mm-150mm wafer capability. Up to 6.25” substrate.
- Up to 4 wafer size capability without hardware change.
- Fixed cassette station and wafer aligner/cooling station.
- Can handle 50um thickness wafer.
- PC controller with Advanced Allwin21 Software.
- Endpoint detection (EOP) with Allwin21 SLOPE technology (Optional).
- Up to 3 gas lines with MFC.
- Air-Cooled 600W MKS 13.56 MHz RF Generator (300W Option).
- Pressure control with Throttle Valve.
- 15-inch Touch screen monitor GUI.
- EMO, Interlocks, and Watchdog function.
- GEM/SECS II (optional).
- Small Footprint: 27”W x 40”D x 59”H (280LBs)
- Made in U.S.A.
Specifications:
- Wafer Size: Up to 6.25 inch.
- Temperature: 60-250ºC (±2ºC)
- Gas Lines: Up to three gas lines with MFCs.
Typical MFC configuration: 5 SLM O2 and 500 SCCM N2.
- Asher Rate: 0.5-1.5 um/min at 200 to 250 ºC, bulk strip; 600 A/min at 100 ºC, Descum
- Uniformity: <±8% (Max-Min) Strip; <±5% (Max-Min) Descum
- Particulate: <0.05 /cm2 (0.03um or greater)
- Damage: CV:<0.1V from control; Mobile Ion:<1-2 E10 ; Vt :0% total shift on 98% of points tested no shift >5%
- Selectivity: >1000:1
- MTBF/MTTA/MTTR: 450 Hours/100 Hours/3.5 Hours or Better.
- 95% uptime
*Contact Allwin21 sales for other applications and specifications
sales@allwin21.com
AW-105R Plasma Asher Descum Equipment was added in Sep 2007
AW-105R Plasma Asher Descum Equipment has been viewed 222 times
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