Intro to Atomic Layer Deposition

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World Leader in providing semiconductor and electronic, instructor-led, short courses.

Fenton, Missouri, USA

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1 (636) 343-1333
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Offered by:	PTI Seminars, Inc.

Intro to Atomic Layer Deposition Description:

Next Scheduled Public Courses:
May 1-2, 2008 ~ Dallas, TX
July 16-17, 2008 ~ San Francisco, CA At SEMICON West
October 23-24, 2008 ~ San Jose, CA
November 6-7, 2008 ~ Dallas, TX

This course is designed to provide the student basics of Atomic Layer Deposition (ALD). The initial portion of the course covers the fundamental concepts involved in ALD, and how it relates to CVD. This includes single crystal semiconductors, amorphous oxides, and metallic conducting films. Following these reviews, we cover the topic of radical-enhanced ALD, and how it enables reduced temperature deposition processes and reviews various types of ALD reactors.

Intro to Atomic Layer Deposition was added in Jan 2008

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