SUPPLIER: Brazil Global Technologies Ltd
TSK UF3000
Model: |
TSK UF3000 |
Category: |
|
Model Year: |
2005 |
Condition: |
|
Location: |
USA |
Offered by: |
|
Contact Supplier |
Configured for 300mm wafer size
Overall accuracy:within 4μm
Stage positioning accuracy: 2μm / φ300mm
Low noise chuck
Mini-Environment Option