kokusai 97600001/976

kokusai 97600001/976 Description:

About Kokusai Electric

Kokusai Electric is a leading company in providing high-productivity batch processing systems and services for memory, foundry and logic customers. Kokusai Electric produces semiconductor manufacturing equipment that leverages world-class coating technology, delivering products and services to the world’s top manufacturers. Kokusai Electric enables the increasingly high functionality and high performance of semiconductors.

Products &Systems

Batch Processing Systems

★High Quality & High Performance Thermal Processing System“TSURUGI-C²

★High-productivity Batch Processing System “AdvancedAce®-300”

★Batch High Temperature Anneal Processing System

★Batch Thermal Process System for 200mm Wafers “VERTRON® Revolution”

Single Wafer Processing System

★Single Wafer Plasma Nitridation / Oxidation System “MARORA®”

★Single wafer Annealing system “TANDUO®”

★Dry Resist Strip System “Lambda300”

Advanced Thermal Process Technology

Overview

KOKUSAI ELECTRIC is proud to introduce a novel, next generation deposition technique, Balance Controlled Deposition (BCD®). 
The BCD® technique provides lower temperature processing and tighter process control for advanced small geometry devices while maintaining very high productivity, which can benefit a wide range of users and process applications.

Features

Excellent step coverage

Precise Film Property Control

Low Temperature Deposition

Good film thickness uniformity

Low Contamination

Contact us anytime

Manager: Cherish

Email: sales6@cambia.cn

Mobile: +86 13599507613

TP-ZEC100-100 Upgrade Kit, XLCNE2 100 Micron CE EA 
TP-ZEC625-100 Upgrade Kit, XLCNE2 62.5 Micron CE EA 
TP-ZEN100-100 Upgrade Kit, XLCNE2 100 Micron N-CE EA 
TP-ZEN625-100 Upgrade Kit, XLCNE2 62.5 Micron N-CE EA 
TP-ZEPKC1-100 IKB TO OEP REPLACEMENT IN CLASSIC EA 
TP-ZEPKZ1-100 IKB TO OEP RELACEMENT IN Z-CONSOLE EA 
TP-ZG2G01 GUS TO GUS CONSOLE UPGRADE EA 
TP-ZG2G01-100 GUS TO GUS 450MHZ FOR CONSOLE MNT & DESKTOP EA 
TP-ZG2G02 GUS TO GUS DESKSIDE UPGRADE EA 
TP-ZG2G02-100 GUS TO GUS 450MHZ FOR DESKSIDE EA