Guidelines for Manufacturing Equipment Reference Manuals
Published: |
August 5, 1999 |
Author: |
Victoria J. Pruett, SEMI/SEMATECH; Julian Serda, Advanced Micro Devices; Darin Shifley, Applied Materials, Inc. |
Abstract: |
This document provides suggested standard contents for equipment reference manuals for semiconductor process equipment. It includes a generic and detailed outline for equipment manuals, with major sections on installing, operating, controlling, and integrating process equipment.... |
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